Semiconductor Solutions

Achieving and maintaining semiconductor production quality demands the most from all of your tools. Advanced lighting technology is employed in photolithography and Rapid Thermal Processing / Rapid Thermal Annealing to assure optimum production yields. EYE / Iwasaki lighting systems and products have demonstrated to be exceptional solutions for these applications. Iwasaki high intensity lighting systems have proven to be indispensable for laboratory and in-line wafer inspection. Iwasaki proprietary light technology allows us to match the technology to the application, and provide unmatched performance and value.

 

Microlithography Production Lighting Products

Iwasaki Electric’s ultra-high pressure short arc mercury lamps deliver unmatched performance.

  • Extended Life – Iwasaki lamps are designed for exceptional life. Our stringent manufacturing process, using only the purest materials, prevents premature irradiation degradation caused by emitter spattering and evaporation during lamp operation.

  • Outstanding Stability – Iwasaki’s lamps utilize state-of-the-art optics coupled with proprietary emitter designs and buffer gas to produce extremely high arc stability, delivering superior beam efficiency.

 

Semiconductor Production

Photochemical Machining

Photolithography STEPPER applications

Direct Replacements for Existing Systems

(Iwasaki manufactures ultra high pressure mercury lamps for most existing photolithographic equipment. If your system is not referenced, please contact us to verify lamp selection and compatibility)

 

Canon Equipment Lamp Dimensions:

Nikon Equipment Lamp Dimensions:

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High Intensity Light Inspection Equipment

Inspection is a critical semiconductor production requirement to achieve necessary yields and performance. Regardless of whether your inspection is manual or machine based, flaws or imperfections can not be detected without proper lighting. EYE / Iwasaki has spent decades developing solar equivalent lighting and optics for just such demanding applications.

EYE / Iwasaki manufactures a complete line inspection products from high intensity lighting components to complete inspection equipment systems. Since EYE / Iwasaki actually designs and manufactures the base components (lamp, filter, reflector, and electronics), we welcome the opportunity to work with you to develop custom solutions for your specific inspection requirements.

Semiconductor Lighting Products

Iwasaki Electric’s proprietary  full spectrum lamps deliver unmatched performance:

  • Component systems to complete lighting packages

  • Proprietary short arc MH lamps and electronic ballasts for optimal performance

  • Ideal for flat panel displays, organic EL, Plasma and LCD applications

EYE Lighting / Iwasaki can provide lighting systems to meet your specific requirements. We welcome the opportunity to work with you.

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Rapid Thermal Processing High Intensity Lamps

In modern semiconductor processing, purity is absolutely critical. Infrared radiation has proven far more efficient than conductive or convective heating systems in many annealing applications. Rapid Thermal Processing using high intensity light energy provides a non-contact clean solution.  EYE Lighting / Iwasaki offers a complete line of quartz halogen high intensity lamps that deliver instant on, and complete power control to supply optimum application flexibility. This ensures shorter process time and significantly reduces the time a wafer must be exposed to high temperature. These compact IR lamps save space and Iwasaki proprietary design technology assures long life performance.

 

EYE / Iwasaki has spent decades developing lighting and optics for semiconductor applications. These are only a few samples of our available products. If you need assistance with your application, or are just looking for replacement lamps, we welcome the opportunity to work with you.
 

Features:

  • Ultra-high purity fill gas and material ensures long life and reliable performance

  • Rugged bulb construction and sturdy mount system minimizes detrimental shock and vibration effects on lamp

  • Heat resistant stainless steel body uniformly distributes heat prolonging lamp life

  • Built-in fuse for added safety

    •

Please contact us for help with your application.

 

(Photos and application information courtesy of Chichibu Iwasaki Co. Ltd. a wholly owned subsidiary of Iwasaki Electric Co.)

 
Color Code Description Watts Volts Product
Code
Black  JID82V500W Standard RTP unit 500 82 86810
Blue  JID82V550W High power standard unit 550 82 84685
Red  JID95V630W High Voltage / Output 630 95 84689
Black-long  JID82V520W Long sleeve design  520 82 89805
White QAP120V2000W/G22 120 2000 86817
Silver JPD120V1000W/G9.5 120 1000 89471
Silver JPD240V1000W/G9.5 240 1000 89620

 

 

 

 

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